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发明名称
Process for preparing a semiconductor body
摘要
申请公布号
EP0469630(B1)
申请公布日期
2002.05.08
申请号
EP19910113048
申请日期
1991.08.02
申请人
CANON KABUSHIKI KAISHA
发明人
YONEHARA, TAKAO
分类号
H01L21/762;(IPC1-7):H01L21/76;H01L21/20
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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