发明名称 |
Method of holding a monocrystal and method of growing the same |
摘要 |
<p>There is disclosed a Czochralski method in which a seed crystal in contact with material melt is pulled, while being rotated, so as to grow a monocrystal, and a part of the crystal being grown is mechanically held during the pulling operation. The crystal is mechanically held in such a way that the weight (W kg) of the crystal satisfies the following Formula (1): <MATH> where D designates the minimum diameter (mm) of a neck. This makes it possible to pull a heavy monocrystal safely and reliably.</p> |
申请公布号 |
EP0831158(B1) |
申请公布日期 |
2002.05.08 |
申请号 |
EP19970306982 |
申请日期 |
1997.09.09 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED |
发明人 |
IINO, EIICHI;IIDA, MAKOTO;KIMURA, MASANORI;MURAOKA, SHOZO |
分类号 |
C30B15/00;C30B15/30;C30B15/32;C30B29/06;(IPC1-7):C30B15/30 |
主分类号 |
C30B15/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|