METHOD FOR SEPARATING ELECTRONIC MATERIAL IN ELECTRONIC MATERIAL CARRY USING ELECTROSTATIC ATTRACTION PLATE

摘要

PROBLEM TO BE SOLVED: To provide a separating method for optionally and surely attracting and separating an electronic material in an electrostatic attraction carry of the plate-like electronic material. SOLUTION: In this separating method of the plate-like electronic material attracted to an electrostatic attraction plate containing a counter electrode by impressing high voltage, supply of the high voltage to the counter electrode is stopped, and the counter electrode is short-circuited.