APPARATUS AND METHOD FOR DETECTING OPERATION STATE OF TURBOPUMP IN ACCELERATOR OF SEMICONDUCTOR ION IMPLANTER

摘要

PURPOSE: An apparatus and a method for detecting the operation state of a turbopump in an accelerator of a semiconductor ion implanter by sensing a driving current of the turbopump while keeping electric isolation are provided. CONSTITUTION: A current sensor(52) detects an electric current supplied to the turbopump(48) used to creating a high vacuum in the accelerator. An electric-photo transducer(54) converts the detected current into a photo signal and then transmits the photo signal to a photo-electric transducer(58) via a photo cable(56) serving to keep electric isolation. The photo-electric transducer(58) converts the photo signal into an electric signal and then transmits the electric signal to an interlock generator(60). The electric signal is shown on a displayer(64) and simultaneously compared to a pre-established value by the interlock generator(60). If the electric signal is beyond the value, the interlock generator(60) generates an interlock signal to turn off the accelerator.