| 摘要 |
PURPOSE: A charge coupled device is provided to improve charge transfer efficiency degraded by uniform electric field according to bias of a poly gate forming HCCD and VCCD. CONSTITUTION: A plurality of photo diodes(not shown) produce electric charges. The VCCD(21) is interposed between the photo diodes and serves to transfer the charges produced by the photo diodes in a vertical direction. The HCCD(22) transfers the vertically transferred charges in a horizontal direction. A sensing amplifier(23) senses and amplifies the charges transferred from the HCCD(22) and then outputs them to a peripheral circuit. In particular, each of the VCCD(21) and the HCCD(22) has a titanium silicide(21a, 22a), which is formed in the center of the poly gate and thereby allows the charges to crowd along the center. The charge transfer efficiency is therefore improved.
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