发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to prevent a short between a plug and a gate without reducing a channel length. CONSTITUTION: An insulating layer(32) is formed on a semiconductor substrate(31). A gate(38) comprises a polysilicon layer formed on the insulating layer, a silicide layer and a cap insulator. An LDD(Lightly Doped Drain) region(39) is formed in the semiconductor substrate. An insulating spacer(40) is formed at both sidewalls of the gate(38). Highly doped source and drain regions(41) are formed in the semiconductor substrate. A plug(43) is electrically connected to the semiconductor substrate via an interlayer dielectric(42) and the insulating layer(32).
申请公布号 KR20020032178(A) 申请公布日期 2002.05.03
申请号 KR20000063194 申请日期 2000.10.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 WEE, SU CHEOL
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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