METHOD AND DEVICE FOR MAKING THIN FILM ELECTRODE OF RUTHENIUM OXIDE HYDRATE

摘要

PURPOSE: Provided are method and device for simply making thin film electrode of ruthenium oxide hydrate taking a short process time. CONSTITUTION: The device consists of an injector(2) atomizing a precursor solution; a substrate(3), on which the precursor solution is atomized; a substrate support(4) for supporting the substrate; direct current power unit connected to the support(4) and injector(2); a distance regulating unit for regulating a distance between the support(4) and the injector(2); and a temperature controller(5) for controlling a temperature of the support(4). The method comprises atomizing ruthenium precursor solution while strong electric field being formed, so as to form porous thin film electrode of very fine particles.