ACTUATOR

摘要

A micro-semiconductor actuator capable of suppressing the deformed amount of a movable part center part, wherein a boundary part (10) for suppressing the transmission of a warping force at a movable part end part caused by the effect of air resistance and inertia force and a heat generated at the drive force generating part (6) of the movable part end part to a movable part center part is provided between the center part and the end part of a rotatable movable part (3) pivotally supported by the torsion bars (4, 4) of the actuator (1) so as to suppress the deformation of the movable part center part.