发明名称 METHOD FOR PROCESSING A WAFER OF INTEGRATED CIRCUITS
摘要 <p>A wafer (2) comprising a plurality of integrated circuits (1) is processed. In an identification step, a defective integrated circuit (1) is identified. In an engraving step, a symbol (11) is engraved on the defective integrated circuit. This allows greater detection reliability with regard to a marking by means of an ink drop.</p>
申请公布号 WO2002035584(A1) 申请公布日期 2002.05.02
申请号 IB2001001990 申请日期 2001.10.24
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