Method for controlling a process line in semiconductor device manufacturing

摘要

Using an algorithm for adding additional waiting times (60) to the process times of consecutively arranged processing devices (30) in a control unit (1) of a semiconductor device mass-production process line, the build-up of queues can be avoided resulting in equal time differences between any two manufacturing steps (101-118). The semiconductor devices (10) - the process line being the lithographic step comprising coating 104, exposure 112 and developing 116 - acquire stable process conditions and the yield is significantly increased due to a larger process window.