发明名称 |
Device for attaching target substrate transfer container to semiconductor processing apparatus |
摘要 |
A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, and to engage with the first engaging portion of the transfer container. A first actuator is disposed to apply a swing-driving force to the clamp. The first actuator has a reciprocation rod pivotally connected to the clamp, and is swingably supported on the lower side of the table.
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申请公布号 |
US2002051701(A1) |
申请公布日期 |
2002.05.02 |
申请号 |
US20010950640 |
申请日期 |
2001.09.13 |
申请人 |
SAEKI HIROAKI;SASAKI YOSHIAKI;TANIYAMA YASUSHI |
发明人 |
SAEKI HIROAKI;SASAKI YOSHIAKI;TANIYAMA YASUSHI |
分类号 |
H01L21/677;(IPC1-7):B65H1/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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