| 发明名称 |
Piezoelektrische Anordnung, eine diese Anordnung benutzender Antrieb und Tintenstrahlaufzeichnungskopf |
| 摘要 |
<p>A piezoelectric device comprises: a lower electrode; a piezoelectric film formed on the lower electrode; and an upper electrode formed on the piezoelectric film, wherein a low dielectric material having a dielectric constant that is lower than the piezoelectric film is formed at grain boundary exposed regions of the piezoelectric film. <IMAGE></p> |
| 申请公布号 |
DE69802214(T2) |
申请公布日期 |
2002.05.02 |
| 申请号 |
DE1998602214T |
申请日期 |
1998.02.03 |
| 申请人 |
SEIKO EPSON CORP., TOKIO/TOKYO |
发明人 |
NISHIWAKI, TSUTOMU |
| 分类号 |
B41J2/045;B41J2/055;B41J2/135;B41J2/14;H01L41/047;H01L41/09;H02N2/00;(IPC1-7):H01L41/22 |
主分类号 |
B41J2/045 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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