发明名称
摘要 A positive photoresist composition is described, which comprises an alkali-soluble resin and 1,2-naphthoquinonediazido-5-(and/or -4-)sulfonate of a polyhydroxy compound represented by the following formula (I): <CHEM> wherein R1 to R11 are the same or different and each represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group, an alkoxyl group, an acyl group or a cycloalkyl group, provided that at least one of R1 to R11 is a cycloalkyl group; A represents -CH(R12)-, in which R12 represents a hydrogen atom or an alkyl group; and m represents 2 or 3.
申请公布号 JP3278306(B2) 申请公布日期 2002.04.30
申请号 JP19940267491 申请日期 1994.10.31
申请人 发明人
分类号 G03F7/022;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/022
代理机构 代理人
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