A reactor for electrochemically processing a microelectronic workpiece includingimproved electrode assembly

摘要

A reactor assembly for electrochemically processing a microelectronic workpiece is set forth. The reactor assembly includes a processing bowl having one or more fluid inlets through which a flow of processing fluid is received. An electrode assembly is located within the process bowl in a fluid flow path of the fluid provided through the one or more fluid inlets. The electrode assembly includes a mesh electrode and a diffuser disposed in the fluid flow path prior to the mesh electrode to tailor the flow of processing fluid received from the one or more fluid inlets through the mesh electrode in a predetermined manner.