INSPECTION DEVICE FOR ELEMENT SUBSTRATE AND INSPECTION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To reduce cost of a product by performing inspection of the defect in a pixel in the process of manufacture, in a light emission device. SOLUTION: Defects can be found in a stage before the light emission device is completed by inspecting a TFT(Thin Film Transistor) formed in a pixel on an element substrate and a TFT formed in a peripheral driving circuit using the inspection device. Thus, yield is enhanced by reducing loss generated by passing a defective product to the final stage and repairing the defective product.