MAGNETRON AND PROCESSING DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a magnetron having an oscillation frequency of 400 to 600 MHz and a processing device using the magnetron. SOLUTION: The magnetron is provided with a negative electrode part including a thermion emission source, a positive electrode part including a plurality of positive electrode vanes, magnetic circuit part including magnet-generating means and a output part including an antenna, and each electrode measures as follows. F (outer diameter of a negative electrode filament)=5.0 to 6.0 mm G (inner diameter of a vane end)=10 to 13 mm D1 (inner diameter of positive electrode cylinder part)=110 to 130 mm F/G [(outer diameter of a negative electrode filament)/(inner diameter of a vane end)]=0.38 to 0.6 L1 (total length of a positive electrode vane)=50 to 56 mm H1 (height of a positive electrode vane)=13 to 15 mm H2 (height of a notched part)=0 to 3 mm T1 (thickness of a positive electrode vane)=7.5 to 8.5 mm.