| 摘要 |
PROBLEM TO BE SOLVED: To provide detection technology used for detecting a semiconductor wafer. SOLUTION: In a first aspect, a valve/sensor assembly 445 including a door assembly 437 is provided. The door assembly 437 has (1) a first position for sealing the opening of a chamber, (2) a second position for extending at least the blade of a substrate handler through the opening of the chamber, and (3) a mounting mechanism 447 for coupling the door assembly 437 to the chamber. The valve/sensor assembly 445 includes a transmitter 451 and a receptor 453 that detect the presence of a substrate W, and communicates through at least one portion of the door assembly 437. A system, a method, and a computer program product are provided in accordance with this and other aspects. |
