| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acceleration sensor of high sensitivity that can eliminate the influence of a factor other than acceleration such as the change of temperature. SOLUTION: A pair of surface wave resonators 3, 4 provided with a pair of electrodes comprising IDT electrodes 3b, 3c, 4b, 4c on the surfaces of piezoelectric substrates 3a, 4a, are jointed at the back faces to face each other, to constitute a bimorph type acceleration detecting element 2, and the acceleration detecting element 2 is fixedly supported at both longitudinal end part by case members 6 so as to bend in a plate thickness direction following the application of acceleration G. The acceleration detecting element 2 is bent by the application of the acceleration G, and the frequency change or impedance change of the surface wave resonators 3, 4 caused by bending is differentially detected to detect acceleration.</p> |
