发明名称 Optic radiation measuring apparatus
摘要 The measurement arrangement has at least one radiation detector (10) for measuring the electromagnetic radiation emitted by one of at least two radiation sources (3) and radiation channels (12) separately formed in a channel body (11) for the radiation path between the sources and the common detector. The cross-section of the radiation channel corresponds to the shape of the source
申请公布号 EP0921558(A3) 申请公布日期 2002.04.24
申请号 EP19980122887 申请日期 1998.12.02
申请人 STEAG RTP SYSTEMS GMBH 发明人 HAUF, MARKUS
分类号 G01J1/02;G01J1/04;G01J5/00;G01J5/06;H01L21/00 主分类号 G01J1/02
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