| 发明名称 |
ULTRA FINE COMPOSITE METAL PARTICLES |
| 摘要 |
<p>The present invention relates to composite metallic ultrafine particles which have excellent dispersion stability and can be produced on an industrial scale, and a process for producing the same, and a method and an apparatus for forming an interconnection with use of the same. According to this invention, a surface of a core metal produced from a metallic salt, a metallic oxide, or a metallic hydroxide and having a particle diameter of 1 to 100 nm is covered with an organic compound including a functional group having chemisorption capability onto the surface of the core metal.</p> |
| 申请公布号 |
EP1199123(A1) |
申请公布日期 |
2002.04.24 |
| 申请号 |
EP20010914183 |
申请日期 |
2001.03.21 |
| 申请人 |
EBARA CORPORATION |
发明人 |
FUKUNAGA, AKIRA;NAGASAWA, HIROSHI;KAGOSHIMA, KAORI;EMOTO, MAKIKO |
| 分类号 |
C23C26/00;B01J13/00;B22F1/00;B22F9/24;H01L21/00;H01L21/02;H01L21/288;H01L21/306;H01L21/321;H01L21/3213;H01L21/768;H05K3/10;(IPC1-7):B22F1/02;B22F9/30;H01L21/304;B22F9/20 |
主分类号 |
C23C26/00 |
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