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发明名称
POLISHING LIQUID COMPOSITION
摘要
申请公布号
EP1198534(A1)
申请公布日期
2002.04.24
申请号
EP20000944356
申请日期
2000.07.07
申请人
发明人
分类号
C09G1/02;C23F3/00;H01L21/3105;H01L21/321;(IPC1-7):C09K3/14;C09K13/00;C09G1/00;H01L21/30
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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