发明名称 |
Method for crystallizing lithium transition metal oxide thin film by plasma treatment |
摘要 |
A method for crystallizing a lithium transition metal oxide thin film for an electrode of a thin film-type lithium secondary battery is provided, in which the lithium transition metal oxide thin film is reacted with oxygen or argon plasma induced by a microwave or a radio frequency wave, thereby obtaining an excellent lithium transition metal oxide thin film in a degree of crystallization and electrochemical characteristics.
|
申请公布号 |
US6376027(B1) |
申请公布日期 |
2002.04.23 |
申请号 |
US20000688987 |
申请日期 |
2000.10.17 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE JAI YOUNG;KANG YOUN SEON;LEE HO;PARK SUNG CHUL;KANG YONG MOOK |
分类号 |
C23C14/08;C23C14/58;H01M4/02;H01M4/04;H01M4/48;(IPC1-7):H05H1/00 |
主分类号 |
C23C14/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|