发明名称 METHOD FOR MANUFACTURING FILTER MEMBER, METHOD FOR CUTTING FILTER MEMBER, METHOD FOR CUTTING FILTER CHIP AND METHOD FOR MANUFACTURING FILTER CHIP
摘要 PROBLEM TO BE SOLVED: To improve productivity of filter chips and to improve the yield. SOLUTION: After a filter member having whole of an annular filter film having good characteristics formed on one glass substrate is obtained, the filter members is cut along lines passing the center of the ring to obtain a plurality of filter members in each of which the filter film having good characteristics is formed like an arc. The filter member obtained by the above division is further cut in the direction rectangular to the chord of the arc to obtain a plurality of filter member chips 140, which are rearranged so that the filter films 120a having good characteristics are aligned almost in a straight line and then the rearranged filter member chips are cut in the direction rectangular to the original cutting direction to obtain the filter chips of the purpose. When the filter film is an optical multilayered film, the filter member is mounted on a state with the filter film upside and is cut by a down-cut method using a dicing saw.
申请公布号 JP2002116319(A) 申请公布日期 2002.04.19
申请号 JP20000308945 申请日期 2000.10.10
申请人 NIKON CORP 发明人 SAKAMOTO MISAO
分类号 B26D3/00;G02B5/20;G02B5/28;H01L21/301;(IPC1-7):G02B5/28 主分类号 B26D3/00
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