| 摘要 |
PURPOSE: An apparatus for transferring a wafer carrier is provided to protect a carrier and a wafer, by buffering a physical impact transferred to the carrier or wafer while using a tube installed in a fixed handler of a carrier stage. CONSTITUTION: A wafer is loaded to the wafer carrier(21). The carrier stage(26) fixes the wafer carrier and transfers the wafer carrier to a carrier transfer unit. A carrier transfer unit separates the wafer carrier from the carrier stage and transfers the wafer carrier to a predetermined position. The fixed handler(23) including a penetration hole and a buffer unit attached to the inner surface of the penetration hole is formed in the wafer carrier. A fixing rod(27) inserted into the penetration hole and fixing the carrier is formed in the carrier stage.
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