发明名称 DEVICE INSPECTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a device inspecting device in which tact is improved by using a two-dimensional positioning device with two slider parts capable of independent positioning and alternately switching the two slider parts between an aligning location and an inspecting location. SOLUTION: The two-dimensional positioning device with the two slider parts capable of independent positioning is used, and the two slider parts are alternately switched between the aligning location and the inspecting location. While a device placed on one slider part is inspected, a device placed on the other slider part is aligned.
申请公布号 JP2002116239(A) 申请公布日期 2002.04.19
申请号 JP20000307205 申请日期 2000.10.06
申请人 YOKOGAWA ELECTRIC CORP 发明人 OIDE TAKESHI
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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