| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room for coating, which is capable of securing a high cleanness by a simple and easy means in a coating process employing a comparatively large size substrate. SOLUTION: Coating in an atmosphere having a high cleanness is permitted even when a comparatively large coating substrate is employed by a method wherein the coating substrate is approached to a fan filter unit 6, mounted in a coating space 5 isolated from outside air by a cover or the like by employing a substrate approaching means to obtain a high cleanness on the surface of the substrate by blowing clean air 7 having a sufficient cleanness from the fan filter unit 6 against the same and, at the same time, the coating is effected in the coating space 5. The space necessitating a high cleanness is a limited part and the securing of the clean air 7 of a large volume is not required while the capacity of the fan filter 6 can be small whereby equipment can be a simple and easy means.
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