摘要 |
PROBLEM TO BE SOLVED: To enable simple switching of two different modes as much as possible for the roles of various processes in a gas laser having an optical system and a mode iris provided in a beam guide space of a laser resonator. SOLUTION: The mode iris removes higher order modes of a laser beam 3 at each time. In the case of setting one of the mode iris and the optical system, a Gaussian mode 9 is generated in one setting, a ring mode 10 is generated in another setting. The Gaussian mode or the ring mode is switched by using a suitable controller according to the role of each of individual processes.
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