| 发明名称 |
EPITAXIAL OXIDE FILMS VIA NITRIDE CONVERSION |
| 摘要 |
The present invention relates to oxide on suitable substrates, as converted from nitride precursors. |
| 申请公布号 |
WO0231893(A1) |
申请公布日期 |
2002.04.18 |
| 申请号 |
WO2001US31924 |
申请日期 |
2001.10.12 |
| 申请人 |
APPLIED THIN FILMS, INC. |
发明人 |
SAMBASIVAN, SANKAR;BARNETT, SCOTT, A.;KIM, ILWON;RECHNER, JOHN, W. |
| 分类号 |
C30B29/22;C23C8/02;C23C14/06;C23C14/08;C30B23/02;C30B33/00;H01L21/318;H01L39/24 |
主分类号 |
C30B29/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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