| 摘要 |
Disclosed are a method and apparatus which can easily measure the thickness of a rust-inhibiting film, provided on a copper surface. The method for measuring the thickness of a rust-inhibiting film, provided on a copper surface by using a rust-inhibiting processing liquid, comprises depositing a copper film on the surface of a crystal vibrator; immersing the copper film of the crystal vibrator in a rust-inhibiting processing liquid; and measuring change in the number of vibrations of the crystal vibrator caused by growth of the rust-inhibiting processing liquid on the copper film. The apparatus for measuring the thickness of a rust-inhibiting film, provided on a copper surface by using a rust-inhibiting processing liquid, comprises a crystal vibrator having a copper film deposited on a surface thereof; and a measuring unit which measures the thickness of the rust-inhibiting film on the copper film by measuring change in the number of vibrations of the crystal vibrator.
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