| 摘要 |
PURPOSE: A micro mirror is provided, which controls an actuation direction of a mirror easily by controlling a voltage applied to each PZT actuator. CONSTITUTION: The micro mirror comprises a PZT actuator(17), a hinge(31) and a mirror plate(21). The mirror plate is formed on a substrate, and four PZT actuators are formed in a cantilever type on an edge of each side of the mirror plate. Then, the four PZT actuators are connected by the hinge formed on the mirror plate, and perform actuation individually according to a voltage applied from the external. Thus, by controlling the voltage applied to each PZT actuator, the actuation direction of the mirror is controlled easily. And an actuation voltage is reduced and an actuation speed can be increased by using the PZT actuation.
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