发明名称 ARRAY PANEL FOR LIQUID CRYSTAL DISPLAY DEVICES AND METHOD FOR FABRICATING THE SAME
摘要 PURPOSE: An array panel for LCD(Liquid Crystal Display) devices and a method for fabricating the same are provided to manufacture the array panel in a structure that prevents the erosion of copper wires by an etching solution and prevents the extension of copper ions, for 4 mask processes. CONSTITUTION: A gate electrode(131) of which a part is exposed is formed on a substrate(100) and formed with copper surrounded with metal oxide. A gate wire formed identically to the gate electrode(131) is extended from the gate electrode(131). A data wire(115) defines a pixel area crossing the gate wire. A drain electrode(135) is away from a source electrode connected with the data wire(115) at a predetermined distance. An active layer is formed on a lower part of the data wire(115), source electrode and drain electrode(135). A pixel electrode(117) connected with the drain electrode(135) is formed in the pixel area. And the metal oxide is one of TiOx, TaOx and CrOx to which one of Ti, Ta, W and Cr, extensible to the gate wire and gate electrode(131) upon hear treatment, is oxidized.
申请公布号 KR20020028430(A) 申请公布日期 2002.04.17
申请号 KR20000059429 申请日期 2000.10.10
申请人 LG.PHILIPS LCD CO., LTD. 发明人 CHAE, GI SEONG
分类号 G02F1/136;G02F1/1362;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/49;(IPC1-7):G02F1/136 主分类号 G02F1/136
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