| 摘要 |
PURPOSE: An optical modulator is provided to solve a fixation problem of an upper layer and a lower layer such that the fixation problem occurs in eliminating a sacrificial layer by using a supporting beam, and to remarkably increase a rotating displacement by adopting a multilevel electrostatic operating structure. CONSTITUTION: A lower electrode(11) is formed on a substrate(10). An upper electrode structure(12) is vertically separated from the lower electrode, capable of rotating. A rotating stage(15) has a degree of rotating freedom corresponding to the number of the upper electrode structures. The first and second lower supporting beams(13,16) support the upper electrode structure and the rotating stage, respectively.
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