| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a lamination device which is capable of registering the position of a film member with high precision of several micron-order when the film member is laminated. SOLUTION: In the lamination device for laminating a support substrate 10 and the film member 40 together using a curing-type adhesive layer, a position registering means which performs the position registering with the help of at least one position registering pattern formed on the support substrate 10 and the film member 40 and a partially fixing means which cures the curing- type adhesive layer near the position registering patterns, are provided as minimum requirements, In addition, a position registering means which performs the position registering with the help of another position registering pattern formed on both support substrate 10 and film member 40 respectively and a partially fixing means which cures a curing-type adhesive layer near the other position registering patterns, are provided. Further, the position registering means includes a tentative position registering means 600 for performing the rough position registering and a precision position registering means 700 for performing the precise position registering.</p> |
