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发明名称
摘要
申请公布号
JP3275036(B2)
申请公布日期
2002.04.15
申请号
JP19930091852
申请日期
1993.03.29
申请人
发明人
分类号
C23F4/00;G21K5/08;H01J27/20;H01J37/08;H01J37/32;H01L21/302;H05H1/24;(IPC1-7):C23F4/00
主分类号
C23F4/00
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代理人
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地址
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