| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can realize the drive with a high efficiency, and can be manufactured easily with a high mass-productivity. SOLUTION: This electrostatic actuator has a 1st electrode (5a, 5b, 5c and 5d) and a 2nd electrode (6a, 6b, 6c and 6d), which are provided with a prescribed spacing between them and a mover 1 which is provided in the spacing, has electrode parts 8 on its side surfaces facing the 1st electrode and the 2nd electrode, and can move in a prescribed direction. The 1st electrode and the 2nd electrode comprise respectively pluralities of electrodes arranged successively in the prescribed direction. An electrostatic capacitance detection means 14, which detects a capacitance between the electrode part and the 1st electrode or the 2nd electrode, and a drive means, which applies a voltage alternately between the 1st electrode and the 2nd electrode selected according to the detection result of the electrostatic capacitance detection means and the mover to drive the mover in the prescribed direction, are provided.
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