SUBSTRATE FOR PHOTOELECTRIC CONVERSION ELEMENT, MANUFACTURING METHOD OF SUBSTRATE, AND PHOTOELECTRIC CONVERSION ELEMENT USING THE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for making uniform and minute a projection with a size that is effective to the refraction or scattering of light when forming a thin film with tin oxide as a main constituent on a substrate, and to provide a photoelectric conversion element for effectively showing optical confinement effect using the substrate that is manufactured using the method. SOLUTION: In a substrate for the photoelectric conversion element that has a thin film with tin oxide as a main constituent, an average of at least 20 projections whose height is equal to or more than 100 nm exist per a surface of 1μm(square) on the surface of the thin film.