| 摘要 |
PROBLEM TO BE SOLVED: To increase a throughput of a cluster tool which is equipped with process chambers having a large temperature gradient. SOLUTION: A robot 132 having a first end effector 172 and a second end effector 174 transfer an object 128 between multiple process chambers 104-110. The first chamber 104 and the second chamber 106 operate at a similar temperature. The third process chamber 108 operates at a temperature different from the first process chamber 104 of the second process chamber 106. The robot executes all object transfer from the first chamber 104 to the second chamber 106, using the first end effector 172, and furthermore the robot 132 executes all object transfer, from the second process chamber 106 to the third process chamber 108 using the second end effector 174. |
