发明名称 |
Wafer loading system positioning method and device |
摘要 |
A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.
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申请公布号 |
US2002041066(A1) |
申请公布日期 |
2002.04.11 |
申请号 |
US20000736664 |
申请日期 |
2000.12.08 |
申请人 |
LIN WU-LANG;CHEN KUAN-CHOU;HU PING-YU;LIANG MUH-WANG;CHEN KUEI-JUNG;WU TZONG-MING |
发明人 |
LIN WU-LANG;CHEN KUAN-CHOU;HU PING-YU;LIANG MUH-WANG;CHEN KUEI-JUNG;WU TZONG-MING |
分类号 |
B65G49/00;H01L21/677;(IPC1-7):B23Q3/00 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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