发明名称 Manufacturing method of semiconductor chip with adhesive agent
摘要 A semiconductor wafer on which elements have been formed is diced and a rear surface of the semiconductor wafer is ground by a dicing before grinding method to form discrete semiconductor chips. The discrete semiconductor chips are adhered to an adhesive film and then the surface of the adhesive film is removably affixed to a dicing tape. After this, any excess portions of the adhesive film disposed between the respective semiconductor chips are removed.
申请公布号 US2002042189(A1) 申请公布日期 2002.04.11
申请号 US20010962499 申请日期 2001.09.25
申请人 TANAKA KAZUYASU 发明人 TANAKA KAZUYASU
分类号 H01L21/52;H01L21/20;H01L21/301;H01L21/68;H01L21/762;H01L21/78;(IPC1-7):H01L21/76 主分类号 H01L21/52
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