VACUUM VESSEL FOR VACUUM EQUIPMENT CHARACTERISTIC EVALUATION TEST

摘要

PROBLEM TO BE SOLVED: To provide a vacuum vessel for vacuum equipment characteristic evaluation test capable of being uniformly and efficiently cooled and keeping this temperature. SOLUTION: In this vacuum vessel for vacuum equipment characteristic evaluation test for performing the characteristic evaluation test of an apparatus to be tested while enclosing the apparatus with the vacuum vessel and keeping the vacuum vessel inner part at a desired temperature and pressure, a coolant passage 12a is bored in a side wall 12 parallel to the horizontal central axis of the vacuum vessel 10, and the vacuum vessel inner part is kept at the desired temperature by passing a coolant in the coolant passage 12a.