发明名称 |
Semiconductor-supporting devices, processes for the production of the same, joined bodies and processes for the production of the same |
摘要 |
A semiconductor-supporting device comprising a substrate made of an insulating material, a conductive member buried in the substrate, and a terminal connected to the conductive member and made of an electrically conductive metallic matrix-ceramic composite body. <IMAGE> |
申请公布号 |
EP0977260(A3) |
申请公布日期 |
2002.04.10 |
申请号 |
EP19990305953 |
申请日期 |
1999.07.27 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
OHASHI, TSUNEAKI;FUJII, TOMOYUKI |
分类号 |
H01L21/68;B81C3/00;H01L21/48;H01L21/683;H01L23/15;H01L23/373 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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