| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of repeatedly precisely reproducing the shape image of a sample or the like without being influenced by environment. SOLUTION: This scanning probe microscope comprises a minute drive means for minutely moving a sample or probe in XYZ directions; displacement detecting means capable of measuring the X, Y, and Z directional displacements of the minute drive means, respectively; and an image correcting means 15 for recording the output values of the displacement detecting means as alignment data and correcting the X, Y, and Z-directional relative positions to form an output image. An SPM measuring part 13 is controlled by an SPM controller 14. The output value of each displacement sensor is read in the SPM controller 14 and transmitted to an operation and display means 16. The output data of the X, Y, and Z sensors are transmitted from the operation and display means 16 to an image correction processing means 15 and processed therein. |
