| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor wafer adsorbing device capable of preventing the reduction of a function of an ejector due to the entry of liquid in advance and adsorbing a semiconductor wafer securely. SOLUTION: This adsorbing device is provided with the ejector 11 generating suction negative pressure due to the flow through of pressurized air and a negative pressure passage 14 for leading the suction negative pressure generated by the ejector 11 into an adsorption panel 5 which is an adsorption part of the semiconductor wafer. A gas-liquid separator 20 is provided in the negative pressure passage 14, and a discharge liquid passage 21 having a check valve 22 for preventing back flow is connected with the gas-liquid separator 20.</p> |
