发明名称 METHOD FOR MEASURING MISALIGNMENT OF EXPOSURE POSITION DURING MANUFACTURING COLOR FILTER, AND COLOR FILTER
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for measuring misalignment in the exposure position during manufacturing a color filter by which misalignment of the exposure position during manufacturing a color filter can be easily, simply and accurately inspected in the line in the manufacture process. SOLUTION: In the method for manufacturing a color filter including steps of forming a light-shielding layer, red color pixels, green color pixels and blue color pixels on a transparent substrate by selective exposure, a dummy light-shielding layer is also exposed and formed in the outside of the color filter forming region at time when the light-shielding layer is exposed and formed. When red, green and blue color pixels are exposed and formed, dummy pixels of each color are formed in the outside of the color filter forming region during the color pixels of red, green and blue colors are exposed and formed in such a manner that each dummy pixel does not contact the above dummy light-shielding layer. In the method for measuring misalignment of the exposure position during manufacturing a color filter, the relative position between the dummy light-shielding layer and the dummy pixels is measured by using transmitted light to measure the misalignment between the light-shielding layer and each color pixels.</p>
申请公布号 JP2002098823(A) 申请公布日期 2002.04.05
申请号 JP20000289642 申请日期 2000.09.22
申请人 TORAY IND INC 发明人 KOBAYASHI KENICHI;KAKINUKI TAKEHIRO;KURAYAMA KYOICHI
分类号 G02B5/20;(IPC1-7):G02B5/20 主分类号 G02B5/20
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