| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the resistivity of a metal diaphragm fixing part against the stress added by the deformation of the metal diaphragm in an oil seal type pressure sensor. SOLUTION: In a recess part 11 of a connector case 10, a sensor chip 20 is arranged and oil 15 is charged. In housing assembled for the connector case 10, a metal diaphragm 34 parting the recess part 11 and a pressure introduction hole 32 of the housing 30 and sealing the oil 15 is fixed at the periphery. The metal diaphragm 34 is pressed and fixed to the housing 30 by an annular pressing member 35 arranged at the periphery. The pressing member 35 constitutes the outer portion as a contact part 35a contacting the metal diaphragm 34 and constitutes the inner portion, which is in taper shape and thinner than the outer portion, as a non-contact part 35b not contacting the metal diaphragm 34.</p> |
