发明名称 |
ARRANGEMENT FOR POLISHING DISK-LIKE OBJECTS |
摘要 |
A polish head (3) for Chemical Mechanical Polishing comprises a backing film (5) made of silicone on a rigid support element (6, 7), preferably consisting of amorphous ceramic. The silicone backing film (5) is fabricated by molding, thereby enabling an appropriate cross-sectional shape for specific polishing needs. The invention provides a uniform polishing of a semiconductor wafer (4).
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申请公布号 |
WO0226443(A1) |
申请公布日期 |
2002.04.04 |
申请号 |
WO2001EP10186 |
申请日期 |
2001.09.04 |
申请人 |
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG;EBNER, KATRIN;GLASHAUSER, WALTER |
发明人 |
EBNER, KATRIN;GLASHAUSER, WALTER |
分类号 |
B24B41/06;H01L21/304;(IPC1-7):B24B37/04 |
主分类号 |
B24B41/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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