发明名称 METHOD OF DISORDERING QUANTUM WELL HETEROSTRUCTURES
摘要 A method of disordering a quantum well heterostructure (2), including the steps of irradiating the heterostructure (2) with a particle beam, wherein the energy of the beam is such that a defect distribution (40) created by the beam within the heterostructure (2) is substantially constant between a top interface (5) and a bottom interface (19) of the heterostructure (2) [see a portion (42) of the distribution (40)]. The irradiating particles can be ions or electrons (light ions such as hydrogen ions are preferred), and the energy is preferably such that the irradiating particles pass through the heterostructure (2), so a peak (44) of maximum defect density lies, for example, within a substrate (4) below the heterostructure (2). The method can be used to tune the wavelength range of an optoelectronic device including the heterostructure (2), such as a photodetector.
申请公布号 WO0227774(A1) 申请公布日期 2002.04.04
申请号 WO2001AU01216 申请日期 2001.09.28
申请人 THE AUSTRALIAN NATIONAL UNIVERSITY;FU, LAN;TAN, HARK, HOE;JAGADISH, CHENNUPATI 发明人 FU, LAN;TAN, HARK, HOE;JAGADISH, CHENNUPATI
分类号 H01L21/18;H01L31/0352;H01L33/06;H01S5/34;(IPC1-7):H01L21/265;H01L21/26;H01L33/00 主分类号 H01L21/18
代理机构 代理人
主权项
地址