| 发明名称 |
Method of manufacturing a mirror structure |
| 摘要 |
<p>Optical cross-connect (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms (450) attached to a glass substrate. <IMAGE></p> |
| 申请公布号 |
EP1193530(A2) |
申请公布日期 |
2002.04.03 |
| 申请号 |
EP20010307643 |
申请日期 |
2001.09.07 |
| 申请人 |
XEROX CORPORATION |
发明人 |
ROSA, MICHEL A.;FORK, DAVID K.;PEETERS, ERIC |
| 分类号 |
B81B3/00;G02B6/35;G02B26/08;(IPC1-7):G02B26/08 |
主分类号 |
B81B3/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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