LASER BEAM MACHINE AND LASER BEAM MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To realize efficiency of laser beam machining by improving scanning speed by a laser beam. SOLUTION: In a laser beam machine 10 wherein a laser oscillator 12 and galvanomirrors 20 and 22 are provided, the first oscillation reflecting mechanism 16 which is equipped with a freely oscillating movable reflector 34 is arranged at a pre-stage of the galvanomirrors 20 and 22 at a distance D from the galvanomirrors 20 and 22. A laser beam L which is outputted from the laser oscillator 12 is guided to the movable reflector 34, and the reflected laser beam L by the movable reflector 34 is guided to the galvanomirrors 20 and 22. When the laser beam L is continuously or intermittently outputted to the movable reflector 34, the movable reflector 34 is controlled to oscillate so that an irradiation position of the laser beam L on a machining surfaceαis shifted along a circular pattern 82.