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发明名称
摘要
申请公布号
JP3269727(B2)
申请公布日期
2002.04.02
申请号
JP19940020467
申请日期
1994.02.17
申请人
发明人
分类号
H01L27/148;H01L21/339;H01L29/762;(IPC1-7):H01L21/339
主分类号
H01L27/148
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